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Quartz Boat

product details

The 6 inch fused wafer carrier quartz glass boat is a high-purity wafer support solution designed for thermal processing applications in semiconductor manufacturing. Made from precision-melted fused quartz glass, this boat offers outstanding resistance to thermal shock, minimal impurity levels, and excellent dimensional stability under high-temperature conditions.

Its structural design ensures secure, evenly spaced wafer positioning, making it ideal for diffusion, oxidation, LPCVD, and annealing processes. The fused quartz material delivers superior chemical resistance and a smooth, low-particle surface, helping to maintain cleanroom standards and reduce wafer contamination risks.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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