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Quartz Boat

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The 6 inch fused silica quartz boat for CVD is a high-purity wafer support component engineered specifically for chemical vapor deposition processes in semiconductor manufacturing. Crafted from ultra-pure fused silica quartz, this boat offers exceptional thermal shock resistance, low thermal expansion, and superior chemical inertness, making it ideal for the demanding environment of CVD reactors.

Its precision-machined design ensures stable wafer placement and uniform gas flow, promoting consistent thin film deposition and minimizing defects. The boat’s material purity reduces contamination risks, while its mechanical strength supports repeated thermal cycling without deformation or cracking. Widely used in semiconductor fabs and research laboratories, this fused silica quartz boat enhances process reliability and yield in advanced CVD applications.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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