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Chamber

product details

The 8 inch quartz chamber serves as a critical enclosure for high-purity, high-temperature semiconductor and photovoltaic processing. Made from premium fused quartz, the chamber offers excellent thermal shock resistance, chemical inertness, and optical transparency, ensuring a contamination-free environment during processes like chemical vapor deposition (CVD), oxidation, and diffusion.

Designed to accommodate 200 mm wafers, the chamber provides uniform temperature and gas distribution, essential for achieving consistent process results and high device yields. Its precision-engineered construction withstands rigorous thermal cycling while maintaining structural integrity and minimizing particle generation.

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